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8 October 2013 Nanofabrication Handbook
Raúl J. Martín-Palma
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Journal of Nanophotonics, Vol. 7, Issue 1, 079897 (October 2013). https://doi.org/10.1117/1.JNP.7.079897
Abstract
Stefano Cabrini and Satoshi Kawata, Eds., 546 pages, 463 illustrations, ISBN: 978-1-4200-9052-9 (hardback) and 978-1-4200-9053-6 (eBook), CRC Press, Boca Raton (2012), £82.00 (hardback). Reviewed by Raúl J. Martín-Palma, Departamento de Física Aplicada, Universidad Autónoma de Madrid, 28049 Cantoblanco, Madrid, Spain, rauljose.martin@uam.es
© The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Raúl J. Martín-Palma "Nanofabrication Handbook," Journal of Nanophotonics 7(1), 079897 (8 October 2013). https://doi.org/10.1117/1.JNP.7.079897
Published: 8 October 2013
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KEYWORDS
Nanofabrication
Lithography
Error control coding
Nanolithography
Electron beam lithography
Metamaterials
Nanoelectromechanical systems
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