Cassegrainian-inverse Cassegrainian four-aspherical mirror system      (magnification = +1) derived from the solution of all zero third-order aberrations and suitable for deep-ultraviolet optical li

Young-Min Cho; Hong-Jin Kong; Sang-Soo Lee

doi:10.1117/12.172890

1 July 1994 Cassegrainian-inverse Cassegrainian four-aspherical mirror system (magnification = +1) derived from the solution of all zero third-order aberrations and suitable for deep-ultraviolet optical lithography

Young-Min Cho, Hong-Jin Kong, Sang-Soo Lee

Author Affiliations +

Optical Engineering, Vol. 33, Issue 7, (July 1994). https://doi.org/10.1117/12.172890

Abstract

A four-aspherical mirror system with unit magnification is investigated for use in deep ultraviolet (DUV) optical lithography. It is derived from the solution of all zero third-order aberrations for the four-spherical mirror system with unit magnification. We have first examined the holosymmetric four-spherical mirror system in which all third-order aberrations are zero and all orders of coma and distortion are also zero. However, the system does not have any optical design freedom left for the correction of higher order aberrations, so a new solution of nonholosymmetric system is derived. In this system aspherizations on the spherical surfaces are carried out to reduce the residual aberrations. The aspherization is optimized to give near diffraction-limited performance for DUV wavelengths of 0.193 μm (ArF excimer laser line). The final system we have obtained consists of all aspherized mirrors with a numerical aperture of 0.35. This reflective system is compact in size and expected to be useful in optical lithographic applications.

Citation Download Citation

Young-Min Cho, Hong-Jin Kong, and Sang-Soo Lee "Cassegrainian-inverse Cassegrainian four-aspherical mirror system (magnification = +1) derived from the solution of all zero third-order aberrations and suitable for deep-ultraviolet optical lithography," Optical Engineering 33(7), (1 July 1994). https://doi.org/10.1117/12.172890

Published: 1 July 1994

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available