High-precision surface shape testing by means of an interferometric sensor

Hans-Joerg Heimbeck; Karl-Edmund Elssner; Andreas Vogel

doi:10.1117/12.205674

1 September 1995 High-precision surface shape testing by means of an interferometric sensor

Hans-Joerg Heimbeck, Karl-Edmund Elssner, Andreas Vogel

Author Affiliations +

Optical Engineering, Vol. 34, Issue 9, (September 1995). https://doi.org/10.1117/12.205674

Abstract

Testing of surlace shapes by automatic interferometry is exact, fast, and comfortable, and therefore popular. It however suffers from drawbacks: the equipment is often quite voluminous and expensive, and the attainable accuracy is limited by the precision of the reference surface (relative testing). Using the phase-shift software of BIFO, which has been improved over the years, Fisba Optik AG recently developed a matchboxsized, cost-reduced interferometric surface shape sensor to overcome the first drawback. Furthermore, this sensor was combined with methods for absolute calibration to solve the reference-surface problem.

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Hans-Joerg Heimbeck, Karl-Edmund Elssner, and Andreas Vogel "High-precision surface shape testing by means of an interferometric sensor," Optical Engineering 34(9), (1 September 1995). https://doi.org/10.1117/12.205674

Published: 1 September 1995

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