Calcium barium niobate ridge waveguide on silicon substrate

Ebrahim Mortazy; Irina Stateikina; Amirhossein Tehranchi; Sebastien Delprat; Mohamed Chaker; Ke Wu

doi:10.1117/1.3463020

1 July 2010 Calcium barium niobate ridge waveguide on silicon substrate

Ebrahim Mortazy, Irina Stateikina, Amirhossein Tehranchi, Sebastien Delprat, Mohamed Chaker, Ke Wu

Author Affiliations +

Optical Engineering, Vol. 49, Issue 7, 074601 (July 2010). https://doi.org/10.1117/1.3463020

Abstract

A novel optical ridge waveguide using calcium barium niobate (CBN) with a high electro-optic coefficient on silicon substrate is proposed for the design and realization of the next-generation hybrid modulators with short length and low driving voltage. To overcome the etching difficulty of CBN, the design of a waveguide, including an elevated CBN layer based on etched silicon dioxide, is presented. Fabrication of a thick 2.5-µm CBN layer is performed using pulsed laser deposition. Deposited silicon dioxide on the sides and top of the CBN reduces the waveguide loss as low as 3.44 dB/cm, measured using a cutback method. Good agreement between the mode profiles of the simulation and measurement is obtained.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ebrahim Mortazy, Irina Stateikina, Amirhossein Tehranchi, Sebastien Delprat, Mohamed Chaker, and Ke Wu "Calcium barium niobate ridge waveguide on silicon substrate," Optical Engineering 49(7), 074601 (1 July 2010). https://doi.org/10.1117/1.3463020

Published: 1 July 2010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available