30 September 2021 Calculated performance of multilayer Laue lens based on actual layer thickness and coupled wave theory
Shuaipeng Yue, Liang Zhou, Ming Li, Peng Liu, Bin Ji, Jingtao Zhu, Guangcai Chang
Author Affiliations +
Abstract

The multilayer Laue lens (MLL) is a promising optical element with large numerical aperture and aspect ratio in synchrotron radiation facility to focus hard x-ray to 1 nm with ideal structure. We use a new method of combining actual film thickness and the coupled wave theory to calculate focusing performance. Here, a 17.2-μm-MLL with a focal spot size of 17 nm at 10 keV is designed and fabricated by dynamical diffraction theory and direct current magnetron sputtering technology. Based on a new rate calibration and symbol layer insertion method, we calculate d-spacing of multilayer instead of individual layer thickness and change the order of two layers as a symbol so as not to damage zone plate law. The scanning electron microscope image is smoothed and binary transformed to measure the actual thickness of each layer. The full-width at half-maximum of focus spot is 18 nm, which is close to the theoretical result of 17 nm.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2021/$28.00 © 2021 SPIE
Shuaipeng Yue, Liang Zhou, Ming Li, Peng Liu, Bin Ji, Jingtao Zhu, and Guangcai Chang "Calculated performance of multilayer Laue lens based on actual layer thickness and coupled wave theory," Optical Engineering 60(9), 094111 (30 September 2021). https://doi.org/10.1117/1.OE.60.9.094111
Received: 7 May 2021; Accepted: 3 September 2021; Published: 30 September 2021
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Cited by 2 scholarly publications.
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KEYWORDS
Multilayers

Diffraction

Image processing

Scanning electron microscopy

Hard x-rays

Zone plates

Sputter deposition

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