27 December 2022 Optical path modulation of interference fringe density based on position errors analysis in oblique laser interferometry
Pengcheng Yang, Liping Lian, Zijian Yu, Yuan Xiao, Xindong Zhu
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Abstract

When laser interferometry is applied to measure the form deviation of a helical tooth flank, dense interference fringes are almost inevitable because of the distorted shape of the helical tooth flank. The high-density fringe leads to poor processing accuracy of interferograms and is an important indicator of the interferogram quality. An optical path optimization method based on position errors analysis is proposed to modulate the fringe density. First, some factors that may affect fringe density in the optical system are modeled. Consequently, the incident angle of the measured light is proved to be the main factor affecting the fringe density and is the primary parameter that modulates the interference fringe density. Subsequently, an analytical model is established, and a fringe density modulation method based on the optimized incident angle is proposed for designing the optical path. Finally, simulated and actual experimental results are provided to verify the correctness of the analysis of the main factor affecting the fringe density and feasibility of the modulation method.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE)
Pengcheng Yang, Liping Lian, Zijian Yu, Yuan Xiao, and Xindong Zhu "Optical path modulation of interference fringe density based on position errors analysis in oblique laser interferometry," Optical Engineering 61(12), 124112 (27 December 2022). https://doi.org/10.1117/1.OE.61.12.124112
Received: 26 July 2022; Accepted: 28 November 2022; Published: 27 December 2022
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KEYWORDS
Teeth

Fringe analysis

Modulation

Interferograms

Error analysis

Optical path differences

Laser interferometry

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