Pedro Vargas Chablé
Doctoral Candidate
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 September 2016 Paper
Proceedings Volume 9936, 99360I (2016) https://doi.org/10.1117/12.2237533
KEYWORDS: Finite element methods, Microelectromechanical systems, Microactuators, Actuators, Microactuators, Silicon, Temperature metrology, Computer simulations, Manufacturing, Lithography, Instrument modeling

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