Dr. Ronald Stübner Profile

Dr. Ronald Stübner

at Fraunhofer Institut fur Photonische Mikrosysteme

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Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper

Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators

Christoph Hohle, Sebastian Döring, Martin Friedrichs, Andreas Gehner, Dirk Rudloff, Matthias Schulze, Ronald Stübner, Daniela Trenkler

Proceedings Volume 11697, 116970V (2021) https://doi.org/10.1117/12.2583036

KEYWORDS: Microelectromechanical systems, Spatial light modulators, Semiconducting wafers, Mirrors, Lithography, Wafer-level optics, System on a chip, Surface micromachining, Optical lithography, Microopto electromechanical systems

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