Engineered optics: high-volume manufacturing of metasurface optical devices

Rutger M. T. Thijssen; Paul Gallagher; Robert J. Visser

doi:10.1117/12.2618060

13 June 2022 Engineered optics: high-volume manufacturing of metasurface optical devices

Rutger M. T. Thijssen, Paul Gallagher, Robert J. Visser

Proceedings Volume PC12054, Novel Patterning Technologies 2022; PC120540V (2022) https://doi.org/10.1117/12.2618060
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

Optical metasurfaces improve current refractive optical devices in performance and form factor, as well as enabling traditionally impossible optical functionality. To create these metasurfaces, we need to transfer Applied Materials’ experience in making nanostructures for electrons to nanostructures for photons. We will show results of devices made on our internal line, which required patterning new materials, with precise control of optical properties, to meet critical dimension and shape requirements. To process transparent substrates we customized equipment and modified process. For yield and cost we tie proven 300 mm wafer processing to optical test equipment for structural and optical test feedback.

Conference Presentation

Citation Download Citation

Rutger M. T. Thijssen, Paul Gallagher, and Robert J. Visser "Engineered optics: high-volume manufacturing of metasurface optical devices", Proc. SPIE PC12054, Novel Patterning Technologies 2022, PC120540V (13 June 2022); https://doi.org/10.1117/12.2618060

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