Presentation
5 October 2023 Subdiffraction 3D nanofabrication and application
Chenliang Ding, Dazhao Zhu, Xi Liu, Qiulan Liu, Cuifang Kuang, Xu Liu
Author Affiliations +
Abstract
This conference presentation was prepared for SPIE Optics + Photonics, 2023.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chenliang Ding, Dazhao Zhu, Xi Liu, Qiulan Liu, Cuifang Kuang, and Xu Liu "Subdiffraction 3D nanofabrication and application", Proc. SPIE PC12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX, PC1265308 (5 October 2023); https://doi.org/10.1117/12.2684534
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KEYWORDS
Nanofabrication

3D applications

Multiphoton lithography

Laser applications

Light absorption

Lithography

Nanotechnology

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