CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12956 > Article
Presentation
10 April 2024 Unique needs of multi-beam mask writing as applied in merchant multi-node applications
Christopher J. Progler
Author Affiliations +
Proceedings Volume PC12956, Novel Patterning Technologies 2024; PC1295607 (2024) https://doi.org/10.1117/12.3012272
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States
Abstract
We will review the evolving merchant motivations for multi-node MBMW deployment including usage landscape and market dynamics. Requirements are broadened to include flexibility, process of record matching, cost, yield, multi-node cycle time, process extension and multi-product R&D pathfinding. Specific attention is paid to model based methods and metrology techniques that assist in efficient adoption of the MBMW systems into already qualified single beam based flows while, at the same time, enable cost effective MBMW based new node development and initial production.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Christopher J. Progler "Unique needs of multi-beam mask writing as applied in merchant multi-node applications", Proc. SPIE PC12956, Novel Patterning Technologies 2024, PC1295607 (10 April 2024); https://doi.org/10.1117/12.3012272
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Industrial applications
Metrology
Industry
Lithography
Manufacturing
Mask making
Modeling
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top