State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance

Wayne M. Moreau

doi:10.1117/12.933404

30 June 1982 State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance

Wayne M. Moreau

Proceedings Volume 0333, Submicron Lithography I; (1982) https://doi.org/10.1117/12.933404
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

The acrylate family of resists have been the most popular choice of positive resists for advanced lithography. Over the last decade, polymethylmethacrylate (PMMA) and derivatives of the general formula continue to show improved performance

Citation Download Citation

Wayne M. Moreau "State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance", Proc. SPIE 0333, Submicron Lithography I, (30 June 1982); https://doi.org/10.1117/12.933404

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