Pseudo-Shear Interferometry

Peter B. Keenan

doi:10.1117/12.936333

15 November 1983 Pseudo-Shear Interferometry

Peter B. Keenan

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936333
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

Pseudo-Shear Interferometry (PSI) is a technique for obtaining enhanced, absolute accuracy in interferometric measurements. Whereas conventional interferometry yields measurements limited in accuracy by the optical system and by the reference surface, Pseudo-Shear Interferometry provides the capability for measurement accuracy which substantially surpasses it. The technique consists of a regimen for data taking and a mathematical procedure for analyzing the resulting data.

Citation Download Citation

Peter B. Keenan "Pseudo-Shear Interferometry", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936333

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