Fabrication Of Micro-Optical Wavelength Division Multiplexer (WDM) Gratings On Glass Using An Ion Etching Technique

Torsten von Lingelsheim; Sungur Aytac

doi:10.1117/12.944806

12 December 1984 Fabrication Of Micro-Optical Wavelength Division Multiplexer (WDM) Gratings On Glass Using An Ion Etching Technique

Torsten von Lingelsheim, Sungur Aytac

Author Affiliations +

Proceedings Volume 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II; (1984) https://doi.org/10.1117/12.944806
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

Highly efficient and good quality blazed diffraction gratings are required to achieve low insertion losses of wavelength division multiplexer/demultiplexer in multichannel multiplex systems. This paper presents a method and describes the technology for fabrication of diffraction gratings on glass using an ion etching technique. In contrast to other methods, ion etching technique allows not only the fabrication of arbitrary blaze angles but also different blaze angles can be realized on a single glass sample. The process is low in cost, uses readily available materials and has mass production capability.

Citation Download Citation

Torsten von Lingelsheim and Sungur Aytac "Fabrication Of Micro-Optical Wavelength Division Multiplexer (WDM) Gratings On Glass Using An Ion Etching Technique", Proc. SPIE 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II, (12 December 1984); https://doi.org/10.1117/12.944806

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