Dissolution Rates Of Thin Polymer Films Using Laser Interferometry

Ferdinand Rodriguez; Robert J. Groele; Philip D. Krasicky

doi:10.1117/12.947809

18 April 1985 Dissolution Rates Of Thin Polymer Films Using Laser Interferometry

Ferdinand Rodriguez, Robert J. Groele, Philip D. Krasicky

Proceedings Volume 0539, Advances in Resist Technology and Processing II; (1985) https://doi.org/10.1117/12.947809
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

Dissolution rates are measured conveniently and accurately using a simple laser inter-ferometer. The apparatus is inexpensive and reliable and yields various kinds of information about the dissolving polymer and its interactions with the solvent or solvent mix-ture. Measurements have been made recently of the polymer of maleic anhydride with alphamethylstyrene. These can be compared with the more extensive reports of past work with poly(methylmethacrylate) and some other polymers. The dissolution process which is desirable is one which proceeds without appreciable swelling of undissolved material. Various thermodynamic anu kinetic parameters are suggested as shedding light on the proper selection of solvents to achieve the best developing systems.

Citation Download Citation

Ferdinand Rodriguez, Robert J. Groele, and Philip D. Krasicky "Dissolution Rates Of Thin Polymer Films Using Laser Interferometry", Proc. SPIE 0539, Advances in Resist Technology and Processing II, (18 April 1985); https://doi.org/10.1117/12.947809

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