Silicon nitride grating waveguide based directional coupler

Jijun Feng; Anyuan Li; Ryoichi Akimoto; Heping Zeng

doi:10.1117/12.2246282

31 October 2016 Silicon nitride grating waveguide based directional coupler

Jijun Feng, Anyuan Li, Ryoichi Akimoto, Heping Zeng

Proceedings Volume 10019, Optoelectronic Devices and Integration VI; 1001905 (2016) https://doi.org/10.1117/12.2246282
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Silicon nitride is a promising wave-guiding material for integrated photonics applications with a wide transparency bandwidth from visible to mid-infrared, with a superior performance in fiber-coupling and propagation losses, more tolerant fabrication process to the structure parameters variation and compatible with the CMOS technology. Directional coupler (DC) is very popular for realizing beam splitter because of its structural simplicity and no excess loss intrinsically. Here, a conventional silicon nitride directional coupler, three-dimensional vertical coupler, and grating waveguide assisted coupler are designed and fabricated, and compared with each other. A grating waveguide based coupler with a period of 300 nm and coupling length of 26 um, can realize a wideband 3-dB splitter for the wavelength in the range from 1540 to 1620 nm, for a transverse electric (TE) polarized wave. With further optimization of the grating period and duty cycle, the device performance can be further improved with a wider bandwidth.

Citation Download Citation

Jijun Feng, Anyuan Li, Ryoichi Akimoto, and Heping Zeng "Silicon nitride grating waveguide based directional coupler", Proc. SPIE 10019, Optoelectronic Devices and Integration VI, 1001905 (31 October 2016); https://doi.org/10.1117/12.2246282

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available