Tiny incident light angle sensor

D. Mitrenga; M. Schädel; A. T. Winzer; S. Völlmeke; K. D. Preuß; J. Freitag; O. Brodersen

doi:10.1117/12.2267135

16 May 2017 Tiny incident light angle sensor

D. Mitrenga, M. Schädel, A. T. Winzer, S. Völlmeke, K. D. Preuß, J. Freitag, O. Brodersen

Proceedings Volume 10231, Optical Sensors 2017; 102312C (2017) https://doi.org/10.1117/12.2267135
Event: SPIE Optics + Optoelectronics, 2017, Prague, Czech Republic

Abstract

A novel device for detecting the intensity and the angles of incoming light is presented. The silicon chip with 1 mm edge length comprises a segmented photo diode with four active areas within the inclined surfaces of a deep etched cavity. Simple signal difference analysis of these signals allow for accurate azimuth and inclination measurement in the range of 0 to 360° and 0 to 55°, respectively. Using an artificial neural network (ANN) calibration strategy the operation range of inclination can be increased up to 85° with typical angle errors below 2°. In this report we present details on design, fabrication, signal analysis and calibration strategies.

Citation Download Citation

D. Mitrenga, M. Schädel, A. T. Winzer, S. Völlmeke, K. D. Preuß, J. Freitag, and O. Brodersen "Tiny incident light angle sensor", Proc. SPIE 10231, Optical Sensors 2017, 102312C (16 May 2017); https://doi.org/10.1117/12.2267135

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