Laser Absorption Spectroscopy: A Sensitive Gas Phase Processing Monitor

Edward A. Whittaker; Chi Man Shum

doi:10.1117/12.951014

15 March 1989 Laser Absorption Spectroscopy: A Sensitive Gas Phase Processing Monitor

Edward A. Whittaker, Chi Man Shum

Proceedings Volume 1037, Monitoring and Control of Plasma-Enhanced Processing of Semiconductors; (1989) https://doi.org/10.1117/12.951014
Event: SPIE Advanced Processing Technologies for Optical and Electronic Devices (colocated wth OPTCON), 1988, Santa Clara, CA, United States

Abstract

We present a summary of our efforts to develop a general purpose probe for plasma and other gas phase processing techniques based on laser absorption spectroscopy. This method offers several advantages for gas phase point monitoring, including line-of-sight optical access, small solid angle detection, absolute species concentration calibration and simple interpretation of spectra. Drawbacks to overcome include limited sensitivity due to laser technical noise and limited spectral coverage of high resolution tunable dye and diode lasers.

Citation Download Citation

Edward A. Whittaker and Chi Man Shum "Laser Absorption Spectroscopy: A Sensitive Gas Phase Processing Monitor", Proc. SPIE 1037, Monitoring and Control of Plasma-Enhanced Processing of Semiconductors, (15 March 1989); https://doi.org/10.1117/12.951014

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