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24 October 2017 Efficient self-seeding in a long cavity-length discharge-excited excimer laser system
Yuanyuan Fan, Huirong Cui, Hui Li, Lijia Zhang, Xingliang Song, Yi Zhou
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Proceedings Volume 10457, AOPC 2017: Laser Components, Systems, and Applications; 104570G (2017) https://doi.org/10.1117/12.2282398
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
A self-seeded discharge-excited ArF excimer laser oscillator using a dual-cavity configuration with long cavity lengths was developed and characterized. Proper designs for effective mode-locking in long cavity-lengths are proposed and demonstrated experimentally, which will significantly improve the energy and monochromaticity. By using the techniques of efficient mode-locking, self-seeded laser outputs with nearly the same linewidths with the seeders and larger energies are obtained. And the mode-locking can be achieved at different laser linewidths and wavelength centers.
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Yuanyuan Fan, Huirong Cui, Hui Li, Lijia Zhang, Xingliang Song, and Yi Zhou "Efficient self-seeding in a long cavity-length discharge-excited excimer laser system", Proc. SPIE 10457, AOPC 2017: Laser Components, Systems, and Applications, 104570G (24 October 2017); https://doi.org/10.1117/12.2282398
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KEYWORDS
Excimer lasers
Laser resonators
Laser systems engineering
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