Optical constants and polarimetric properties of AlN thin films

Yu. A. Ushenko; P. D. Maryanchuk; M. M. Solovan; L. J. Pidkamin; V. V. Brus

doi:10.1117/12.2305365

18 January 2018 Optical constants and polarimetric properties of AlN thin films

Yu. A. Ushenko, P. D. Maryanchuk, M. M. Solovan, L. J. Pidkamin, V. V. Brus

Proceedings Volume 10612, Thirteenth International Conference on Correlation Optics; 106121A (2018) https://doi.org/10.1117/12.2305365
Event: Thirteenth International Conference on Correlation Optics, 2017, Chernivtsi, Ukraine

Abstract

The results of an experimental study of the polarization characteristics of thin films based on aluminum nitride (AlN) are presented. It was found that an increase in the partial pressure of nitrogen (with the appropriate technology for producing the AlN film) leads to a substantial increase in the absorptivity of the film itself and a decrease in its linear dichroism parameter.

Citation Download Citation

Yu. A. Ushenko, P. D. Maryanchuk, M. M. Solovan, L. J. Pidkamin, and V. V. Brus "Optical constants and polarimetric properties of AlN thin films", Proc. SPIE 10612, Thirteenth International Conference on Correlation Optics, 106121A (18 January 2018); https://doi.org/10.1117/12.2305365

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