Investigation of Sc2O3 for high laser durability ultraviolet coating applications

Jing Du; Jue Wang; Gary A. Hart; Jean Francois Oudard

doi:10.1117/12.2311330

27 June 2018 Investigation of Sc₂O₃ for high laser durability ultraviolet coating applications

Jing Du, Jue Wang, Gary A. Hart, Jean Francois Oudard

Proceedings Volume 10691, Advances in Optical Thin Films VI; 1069112 (2018) https://doi.org/10.1117/12.2311330
Event: SPIE Optical Systems Design, 2018, Frankfurt, Germany

Abstract

The potential application of high-power UV lasers as an illumination source has stimulated the study and the development of new materials with high refractive index as constituents for optical devices. As a wide band gap and high refractive index material, Sc₂O₃ has been explored for UV optical coating applications. The physical and optical properties of Sc₂O₃ films are strongly dependent upon the deposition method, growth conditions and some postdeposition treatment. Plasma ion assisted deposition (PIAD) is a well-known advanced deposition technique to deposit dense dielectric films with superior optical properties such as smoothness, low scatter, and environmental stability. This research work is to apply PIAD process to obtain homogenous and UV transparent Sc₂O₃ layers to be paired with SiO₂ to prepare UV 266nm antireflection coatings. Higher bandgap materials require higher photon energies when absorbed by a material and converted to electron excitation which promotes a valence electron to the conduction band. This would result in higher laser damage threshold. The coating performance and UV laser induced damage threshold of these AR coatings made with Sc₂O₃ layered with SiO₂ are compared with the coatings made with HfO₂-SiO₂ paired AR coatings. The Sc₂O₃-SiO₂ paired coatings demonstrate a comparable low reflectivity to AR coatings using HfO₂ as high index materials. Furthermore, it shows a higher UV laser damage threshold than HfO₂-SiO₂ paired AR coatings. Sc₂O₃ demonstrates its potential application through this research work as optical interference coatings for high power UV laser devices.

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Jing Du, Jue Wang, Gary A. Hart, and Jean Francois Oudard "Investigation of Sc₂O₃ for high laser durability ultraviolet coating applications", Proc. SPIE 10691, Advances in Optical Thin Films VI, 1069112 (27 June 2018); https://doi.org/10.1117/12.2311330

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KEYWORDS

Scandium

Antireflective coatings

Absorption

Coating

Transmittance

Plasma

Ultraviolet radiation

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