Study on the heat deformation rule of optical element in the continuous polishing processing

Yiren Wang; Feihu Zhang; Defeng Liao; Jian Wang; Qiao Xu

doi:10.1117/12.2504796

16 January 2019 Study on the heat deformation rule of optical element in the continuous polishing processing

Yiren Wang, Feihu Zhang, Defeng Liao, Jian Wang, Qiao Xu

Proceedings Volume 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 1083807 (2019) https://doi.org/10.1117/12.2504796
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

In the continuous polishing process, the deformation caused by the uneven temperature distribution inside the optical element seriously affects the processing accuracy. This article combines domestic and international studies on the heat deformation of optical elements, and the formula for calculating the heat deformation of optical elements is proposed. Based on the Ansys software, the heat deformation of the element is simulated and analyzed, and the accuracy of the formula is verified. The effects of different shapes, materials, thicknesses, temperature difference on the heat deformation of the optical element are analyzed. After the optical element is processed, the temperature surface measurement experiment is performed to obtain the change of the temperature and the surface figure of the optical element in the cooling process, which has guided significance for improving the continuous polishing temperature field.

Citation Download Citation

Yiren Wang, Feihu Zhang, Defeng Liao, Jian Wang, and Qiao Xu "Study on the heat deformation rule of optical element in the continuous polishing processing", Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 1083807 (16 January 2019); https://doi.org/10.1117/12.2504796

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