Non-paraxial diffraction of tiny pinhole illuminated by partially coherent light

Zengxiong Lu; Yuejing Qi; Jiani Su; Qingyang Zhang; Bing Li; Guanghua Yang; Wei Qi

doi:10.1117/12.2505387

24 January 2019 Non-paraxial diffraction of tiny pinhole illuminated by partially coherent light

Zengxiong Lu, Yuejing Qi, Jiani Su, Qingyang Zhang, Bing Li, Guanghua Yang, Wei Qi

Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 1084003 (2019) https://doi.org/10.1117/12.2505387
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

The theory of partial coherence has important applications in many fields such as optical system imaging, optical projection lithography, optical communication and speckle metrology. A tiny pinhole is essential to calibrate the wavefront error of the collimating lens when testing the wavefront error of the projection optics by using the method of Shack-Hartmann wavefront sensor. In this paper, a formulation is developed for investigating the intensity distribution in the far field diffracted by a circular tiny pinhole illuminated with partially coherent light. Assuming that aperture complex coherence is Bessel's correlation, the diffraction field far away from the pinhole is numerical calculated. The actual distribution of the field diffracted by the tiny pinhole is influenced by both the pinhole diameter and the coherence of light inside the pinhole aperture.

Citation Download Citation

Zengxiong Lu, Yuejing Qi, Jiani Su, Qingyang Zhang, Bing Li, Guanghua Yang, and Wei Qi "Non-paraxial diffraction of tiny pinhole illuminated by partially coherent light", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 1084003 (24 January 2019); https://doi.org/10.1117/12.2505387

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available