Repeatability study on different interference systems

Linghua Zhang D.D.S.; Bo Zhang; Sen Han; Shouhong Tang; Chengjin Zhuang

doi:10.1117/12.2505406

12 December 2018 Repeatability study on different interference systems

Linghua Zhang D.D.S., Bo Zhang, Sen Han, Shouhong Tang, Chengjin Zhuang

Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 108470O (2018) https://doi.org/10.1117/12.2505406
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

Interferometry repeatability is an important indicator for measuring instrumentation and test results. The precondition of improving the detection accuracy is to ensure high-precision repeatability, so high-precision repeatability is one of the most important indicators in precision detection. In the Fizeau interferometer, common light paths are used for the distances from the laser light source to the reference surface, from the reference surface to the detector CCD, and the reference beam and the test beam. However, the strict sense of the co-beam does not exist, and it is not absolute ideal that reference plane has high-precision surface. The test beam reflects from the measured surface will have a certain angular deviation from the reference beam. If so, it may make the reference beam and the test beam reach the CCD detector along different optical paths and generate return error accordingly. And finally it makes effects in sampling and wave surface reproduction. Therefore, using the Zygo GPI system, the 4D system and the H and L system to make research on the same optical platform for relative interferometry repeatability comparison, ensuring that the cavity length is the same, and the standard reference mirror and the tested mirror is the same. Measurements were repeated 50 times for zero-stripes, five-stripes, and ten-stripes. The PV values and RMS values of the 50 measurements make mean processing to reflect the measurement repeatability. Further repeatability error analysis is performed on the phase shift algorithm and PZT phase shifter.

Citation Download Citation

Linghua Zhang D.D.S., Bo Zhang, Sen Han, Shouhong Tang, and Chengjin Zhuang "Repeatability study on different interference systems", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 108470O (12 December 2018); https://doi.org/10.1117/12.2505406

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KEYWORDS

Phase shifts

Interferometry

Ceramics

Ferroelectric materials

Fizeau interferometers

Error analysis

Gemini Planet Imager

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