Ms. Linghua Zhang Profile

Linghua Zhang

Doctoral Candidate at Univ. of Shanghai for Science and Technology

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Author

Publications (13)

Proceedings Article | 27 November 2023 Paper

Spectral analysis algorithm of vibration effect in phase-shifting interferometry

Wujun Lv, Ying Yang, Linghua Zhang, Yuhang Shen, Manlin Han, Jingming Guo, Chenxi Gong, Sen Han

Proceedings Volume 12769, 127690P (2023) https://doi.org/10.1117/12.2687344

KEYWORDS: Vibration, Phase interferometry, Phase measurement, Signal intensity, Phase shifts, Fizeau interferometers, Vibration simulation, Error analysis, Distortion, Interferograms

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Proceedings Article | 27 November 2023 Paper

Measurement and analysis of a 4″-18″ aperture dual-beam Fizeau interferometer

Yuhang Shen, Ying Yang, Sen Han, Xueyuan Li, Linghua Zhang, Chenxi Gong, Jingming Gou, Wujun Lv, Manlin Han, Quanzhao Wang, Bo Zhang, Jincheng Zhuang

Proceedings Volume 12769, 127690H (2023) https://doi.org/10.1117/12.2687259

KEYWORDS: Fizeau interferometers, Phase shifts, Optical testing, Astronomical interferometers, Optics manufacturing, Optical surfaces, Laser development, Astronomical imaging, Tolerancing, Spectral density

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Proceedings Article | 27 November 2023 Paper

Analysis of vibration causes of large aperture wafer under vertical support

Ying Yang, Yuhang Shen, Wujun Lv, Linghua Zhang, Sen Han, Manlin Han, Jingming Guo, Chenxi Gong

Proceedings Volume 12769, 127690N (2023) https://doi.org/10.1117/12.2686769

KEYWORDS: Semiconducting wafers, Vibration, Environmental sensing, Turbulence, Wafer inspection, Laboratories, Thermal stability, Interferometry

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Proceedings Article | 27 November 2023 Poster + Paper

Multi-wavelength laser interferometer control system design

Chenxi Gong, Yuhang Shen, Sen Han, Jingming Guo, Ying Yang, Wujun Lv, Yuhang Li, Linghua Zhang, Manlin Han

Proceedings Volume 12769, 127691A (2023) https://doi.org/10.1117/12.2686984

KEYWORDS: Fizeau interferometers, Wavefronts, Control systems design, Control systems, Switching, Optical transmission, Equipment, Wavefront errors, Visualization, Signal detection

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Proceedings Article | 27 November 2023 Poster + Paper

Analysis of defocus error on the absolute measurement of spherical surface

Jingming Guo, Sen Han, Linghua Zhang, Yuhang Shen, Wujun Lv, Ying Yang, Chenxi Gong, Yuhang Li, Manlin Han

Proceedings Volume 12769, 1276916 (2023) https://doi.org/10.1117/12.2686758

KEYWORDS: Error analysis, Spherical lenses, Fizeau interferometers, Equipment, Optical metrology, Optical interferometry, Inspection, Confocal microscopy, Zemax, Optical surfaces

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Proceedings Article | 19 December 2022 Poster + Paper

Interferometric measurement of thickness variation of double-sided polished wafer

Xiaoyue Bian, Sen Han, Jun Cheng, Linghua Zhang, Quanzhao Wang, Xueyuan Li, Quanying Wu

Proceedings Volume 12319, 123191B (2022) https://doi.org/10.1117/12.2643049

KEYWORDS: Semiconducting wafers, Interferometers, Polishing, Phase interferometry, Photovoltaics, Surface finishing, Interferometry, Wafer bonding, Reliability, Phase shifts

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Proceedings Article | 19 December 2022 Poster + Paper

Simulation research of illumination system with coherent noise suppression

Xianhao Qi, Sen Han, Linghua Zhang, Xianyu Wu, Jun Cheng, Erhui Qi, Haixiang Hu

Proceedings Volume 12319, 123191A (2022) https://doi.org/10.1117/12.2642907

KEYWORDS: Light sources, Scattering, Interferometry, Interferometers, Light scattering, Fizeau interferometers, Light, Beam splitters, Laser scattering, Sensors

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Proceedings Article | 19 December 2022 Poster + Paper

Research on interferometric inspection of surface topography of ring elements

Jun Cheng, Sen Han, Xiaoyue Bian, Xianyu Wu, Xianhao Qi, Linghua Zhang, Qiang Cheng

Proceedings Volume 12319, 123191F (2022) https://doi.org/10.1117/12.2643403

KEYWORDS: Inspection, Interferometers, Interferometry, Technology, Spherical lenses, Design and modelling, Optical components, Equipment, Mirrors, Metals

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Proceedings Article | 19 December 2022 Poster + Paper

Design of wireless control system for dual beam interferometer

Xu Jia, Sen Han, Quanying Wu, Linghua Zhang, Xueyuan Li, Quanzhao Wang

Proceedings Volume 12319, 123191G (2022) https://doi.org/10.1117/12.2643444

KEYWORDS: Interferometry, Control systems design, Calibration, Interferometers, Control systems, Switching, Switches, Interfaces, Microsoft Foundation Class Library, Channel projecting optics

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Proceedings Article | 9 October 2021 Paper

Absolute calibration of smooth surface and cylindrical surface measurement

Sen Han, Linghua Zhang, Wenxin Jia

Proceedings Volume 11899, 1189907 (2021) https://doi.org/10.1117/12.2603712

KEYWORDS: Mirrors, Off axis mirrors, Wavefronts, Interferometers, Data conversion, Computer generated holography, Spherical lenses, Crystals, Reflectors, Photovoltaics

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Proceedings Article | 12 December 2018 Paper

Repeatability study on different interference systems

Linghua Zhang, Bo Zhang, Sen Han, Shouhong Tang, Chengjin Zhuang

Proceedings Volume 10847, 108470O (2018) https://doi.org/10.1117/12.2505406

KEYWORDS: Phase shifts, Interferometry, Ceramics, Ferroelectric materials, Fizeau interferometers, Gemini Planet Imager, Mirrors, Photovoltaics, Error analysis, Phase shift keying

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Proceedings Article | 18 August 2018 Presentation + Paper

Further improvements of digital interferometer

Sen Han, Jincheng Zhuang, Linghua Zhang, Hao Sun, Ming Jiang, Quanzhao Wang, Xueyuan Li, Bo Zhang

Proceedings Volume 10749, 1074916 (2018) https://doi.org/10.1117/12.2323368

KEYWORDS: Interferometers, Error analysis, Photovoltaics, Interferometry, Computer generated holography, Fizeau interferometers, Temperature metrology, Calibration, Mirrors, Finite element methods

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Proceedings Article | 8 March 2017 Paper

Measurement of high accuracy flatness using a commercial interferometer

Yuchen Li, Xueyuan Li, Quanzhao Wang, Sen Han, Shouhong Tang, Quanying Wu, Linghua Zhang

Proceedings Volume 10255, 102551H (2017) https://doi.org/10.1117/12.2268364

KEYWORDS: Interferometers, Optics manufacturing, Temperature metrology, Photovoltaics, Calibration, Interferometry, Optical testing, Error analysis, Phase shifts, Data processing

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Showing 5 of 13 publications

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