Performance Characteristics Of A Narrow Band Industrial Excimer Laser

R. K. Brimacombe; T. J. McKee; E. D. Mortimer; B. Norris; J. Reid; T. A. Znotins

doi:10.1117/12.953170

25 July 1989 Performance Characteristics Of A Narrow Band Industrial Excimer Laser

R. K. Brimacombe, T. J. McKee, E. D. Mortimer, B. Norris, J. Reid, T. A. Znotins

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953170
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

In this paper, the performance characteristics of the INDEX 300 lithographic industrial excimer laser are presented. The laser operates with a linewidth of 3.0 pm and spectral purity of 94%. The wavelength stability is better than ± 1.0 pm over short and long term operation in both continuous and intermittent modes. By means of a novel technique, an absolute wavelength standard is used as a reference for wavelength stabilization. The advantages of this approach to wavelength stabilization are discussed.

Citation Download Citation

R. K. Brimacombe, T. J. McKee, E. D. Mortimer, B. Norris, J. Reid, and T. A. Znotins "Performance Characteristics Of A Narrow Band Industrial Excimer Laser", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953170

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