The in-situ long trace profiler window glass thermal deformation effect of measurement analysis

Ming-Ying Hsu; Gung-Chian Yin; Chien-yu Lee; Bo-Yi Chen; Hok-Sum Fung; Shang-Wei Lin; Duan-Jen Wang; Yu-Shan Huang

doi:10.1117/12.2529051

11 September 2019 The in-situ long trace profiler window glass thermal deformation effect of measurement analysis

Ming-Ying Hsu, Gung-Chian Yin, Chien-yu Lee, Bo-Yi Chen, Hok-Sum Fung, Shang-Wei Lin, Duan-Jen Wang, Yu-Shan Huang

Proceedings Volume 11103, Optical Modeling and System Alignment; 111030D (2019) https://doi.org/10.1117/12.2529051
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Long trace profiler (LTP) is used to measure the large radius mirror surface profile. The in-situ LTP can be used to measure the X-ray mirror of an adaptive mirror bending system inside the vacuum chamber. In this study, the in-situ LTP measure head is outside of vacuum chamber. Therefore, the vacuum chamber and window glass thermal effect can introduce errors into the measurement results. This study calculated temperature distribution and deformation using the finite element method (FEM) software and calculate incident ray through the window glass. The incident ray through window glass with thermal gradient could increase optical path difference (OPD). The calculation resulted in an evaluation of in-situ LTP measurement error by thermal deformation.

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Ming-Ying Hsu, Gung-Chian Yin, Chien-yu Lee, Bo-Yi Chen, Hok-Sum Fung, Shang-Wei Lin, Duan-Jen Wang, and Yu-Shan Huang "The in-situ long trace profiler window glass thermal deformation effect of measurement analysis", Proc. SPIE 11103, Optical Modeling and System Alignment, 111030D (11 September 2019); https://doi.org/10.1117/12.2529051

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