Low capacitance SWIR photodetectors for high speed sensing applications

Wei Zhang; Michael J. Evans; John Liobe; Wei Huang; Paul Bereznycky; Devon Wang; Doug Malchow; Scott Endicter; William J. Gustus; Manuel Morales; Michael Caro; Sean Houlihan

doi:10.1117/12.2560713

26 May 2020 Low capacitance SWIR photodetectors for high speed sensing applications

Wei Zhang, Michael J. Evans, John Liobe, Wei Huang, Paul Bereznycky, Devon Wang, Doug Malchow, Scott Endicter, William J. Gustus, Manuel Morales, Michael Caro, Sean Houlihan

Author Affiliations +

Proceedings Volume 11407, Infrared Technology and Applications XLVI; 114070C (2020) https://doi.org/10.1117/12.2560713
Event: SPIE Defense + Commercial Sensing, 2020, Online Only

Abstract

Sensors Unlimited Inc. (SUI), a Collins Aerospace Company, has developed a large-area, high-speed, short-wave infrared (SWIR) focal plane array (FPA) to meet the field-of-view (FOV) and bandwidth requirements of LiDAR applications. Modifications to SUI’s standard InGaAs photodiode array (PDA), include junction shape, dielectric thickness, and contact metallization. These changes allow for a reduction in the effective capacitance seen by the hybridized FPA’s readout integrated circuit (ROIC) while preserving the epitaxial structure that ensures the company’s industry-leading dark current. Compared to SUI’s standard device, significant capacitance reductions have been demonstrated. Enhancements of laser pulse detection performance arising from the capacitance improvement, and suitability of the resulting device for implementation in LiDAR systems, will be discussed.

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Wei Zhang, Michael J. Evans, John Liobe, Wei Huang, Paul Bereznycky, Devon Wang, Doug Malchow, Scott Endicter, William J. Gustus, Manuel Morales, Michael Caro, and Sean Houlihan "Low capacitance SWIR photodetectors for high speed sensing applications", Proc. SPIE 11407, Infrared Technology and Applications XLVI, 114070C (26 May 2020); https://doi.org/10.1117/12.2560713

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