Performance evaluation experiments on scanning probe microscope

Sen Zhou; Yikun Xiong; Jin Zhou; Tong Liu

doi:10.1117/12.2572688

10 October 2020 Performance evaluation experiments on scanning probe microscope

Sen Zhou, Yikun Xiong, Jin Zhou, Tong Liu

Proceedings Volume 11556, Nanophotonics and Micro/Nano Optics VI; 115560L (2020) https://doi.org/10.1117/12.2572688
Event: SPIE/COS Photonics Asia, 2020, Online Only

Conference Poster

Abstract

Nowadays, with 3D topographic features increasingly complicated and complex, scanning probe microscopes have widely been used of nano-scale dimensional measurement in the semiconductor manufacturing and space industry, which can create three-dimensional data over almost all solids in a wide range of ambient. Although scanning probe microscopes readily achieve nanometer level resolution images of measured surfaces, there are several aspects of their behavior that can cause them to yield large measurement errors. In this paper, according to possible traceability pathways for calibration of lateral axes and z axis, both pitch and step height measurements are respectively performed and axis error self-correction model is proposed. The influence of thermal stability on drift error is also discussed. Experimental results show that our method will be helpful for a fast performance evaluation test for scanning probe microscope.

Citation Download Citation

Sen Zhou, Yikun Xiong, Jin Zhou, and Tong Liu "Performance evaluation experiments on scanning probe microscope", Proc. SPIE 11556, Nanophotonics and Micro/Nano Optics VI, 115560L (10 October 2020); https://doi.org/10.1117/12.2572688

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available