Layout pattern catalogs: from abstract algebra to advanced applications for physical verification and DFM

Luigi Capodieci; Vito Dai

doi:10.1117/12.2585319

22 February 2021 Layout pattern catalogs: from abstract algebra to advanced applications for physical verification and DFM

Luigi Capodieci, Vito Dai

Author Affiliations +

Proceedings Volume 11614, Design-Process-Technology Co-optimization XV; 1161407 (2021) https://doi.org/10.1117/12.2585319
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

Automated generation of Layout Pattern Catalogs (LPC) has been enabled by full-chip pattern matching EDA tools, capable of searching and classifying both topological and dimensional variations in layout shapes, extracting massive datasets of component patterns from one (or more) given layouts. This work presents a novel theoretical framework for the systematic analysis of Layout Pattern Catalogs (LPC). Two algebraic structures (lattices and matroids) are introduced, allowing for the complete characterization of all LPC datasets. Technical results go beyond the general mathematical theory of combinatorial pattern spaces, demonstrating a direct path to novel physical design verification algorithms and DFM optimization applications.

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Luigi Capodieci and Vito Dai "Layout pattern catalogs: from abstract algebra to advanced applications for physical verification and DFM", Proc. SPIE 11614, Design-Process-Technology Co-optimization XV, 1161407 (22 February 2021); https://doi.org/10.1117/12.2585319

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