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A transmission-mode high sensitivity quantitative phase microscope (QPM) is developed for profiling transparent thin film structures. The QPM system is implemented with a common-path interferometry design and a high well-depth camera, which has allowed us to achieve an optical path length difference sensitivity of around 50 picometers. A frame averaging method can be used to further improve the sensitivity. To account for multiple interference within thin films, a transmission matrix model is developed to achieve accurate height profile reconstruction. With the correction model, the profiling accuracy can be improved from 20.6% to 4.0% for a MoS2 thin film with a thickness of around 25 nm.
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Yujie Nie, Nansen Zhou, Li Tao, Guodong Zhou, Ni Zhao, Jianbin Xu, Renjie Zhou, "Transparent thin-film metrology with a high sensitivity transmission-mode quantitative phase microscope," Proc. SPIE 11653, Quantitative Phase Imaging VII, 116530E (8 March 2021); https://doi.org/10.1117/12.2579035