Identifying the type of line edge roughness using grazing-incidence x-ray fluorescence

Zanyar Salami; Analía Fernández Herrero; Anna Andrle; Philipp Hönicke; Victor Soltwisch

doi:10.1117/12.2592611

21 June 2021 Identifying the type of line edge roughness using grazing-incidence x-ray fluorescence

Zanyar Salami, Analía Fernández Herrero, Anna Andrle, Philipp Hönicke, Victor Soltwisch

Proceedings Volume 11783, Modeling Aspects in Optical Metrology VIII; 1178307 (2021) https://doi.org/10.1117/12.2592611
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

The increasing complexity and decreasing sizes of nanostructures in microelectronic devices challenge the existing metrology methods. Moreover, as the dimensions of nanostructures continue to decrease, the overall effect of imperfections increases. For lithographic lamellar gratings, the most characteristic type of roughness is lineedge roughness, which affects the uniformity of the line edge of the line. Grazing incidence X-Ray fluorescence (GIXRF) is a non-destructive, ensemble and element sensitive method with high sensitivity to the line shapes of lamellar nanostructures. However, the effect of line-edge roughness on the angular distribution of the GIXRF is unknown. Here, the effect of line-edge roughness of lamellar gratings on the GIXRF intensity is investigated using a series of test samples with different artificial line-edge roughness profiles. We observed that the angular distribution of the GIXRF intensity is affected by the roughness.

Conference Presentation

Citation Download Citation

Zanyar Salami, Analía Fernández Herrero, Anna Andrle, Philipp Hönicke, and Victor Soltwisch "Identifying the type of line edge roughness using grazing-incidence x-ray fluorescence", Proc. SPIE 11783, Modeling Aspects in Optical Metrology VIII, 1178307 (21 June 2021); https://doi.org/10.1117/12.2592611

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