Dr. Philipp Hönicke Profile

Dr. Philipp Hönicke

at Physikalisch-Technische Bundesanstalt

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Author

Publications (7)

Proceedings Article | 27 April 2023 Presentation + Paper

Small target compatible dimensional and analytical metrology for semiconductor nanostructures using x-ray fluorescence techniques

Philipp Hönicke, Yves Kayser, Victor Soltwisch, Andre Wählisch, Nils Wauschkuhn, Jeroen Scheerder, Claudia Fleischmann, Janusz Bogdanowicz, Anne-Laure Charley, Anabela Veloso, Roger Loo, Hans Mertens, Andriy Hikavyy, Thomas Siefke, Anna Andrle, Grzegorz Gwalt, Frank Siewert, Richard Ciesielski, Burkhard Beckhoff

Proceedings Volume 12496, 124961J (2023) https://doi.org/10.1117/12.2657963

KEYWORDS: Nanostructures, X-ray fluorescence spectroscopy, Metrology, Semiconductors, Fluorescence intensity, Data modeling, Transmission electron microscopy, Small targets

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Proceedings Article | 27 April 2023 Presentation + Paper

Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

Richard Ciesielski, Leonhard Lohr, Hans Mertens, Anne-Laure Charley, Rudi de Ruyter, Janusz Bogdanowicz, Philipp Hönicke, Najmeh Abbasirad, Victor Soltwisch

Proceedings Volume 12496, 124961M (2023) https://doi.org/10.1117/12.2658501

KEYWORDS: Extreme ultraviolet, Scatterometry, Data modeling, Diffraction, Nanostructures, X-rays, Finite element methods, Scattering

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Proceedings Article | 21 June 2021 Presentation + Paper

Identifying the type of line edge roughness using grazing-incidence x-ray fluorescence

Zanyar Salami, Analía Fernández Herrero, Anna Andrle, Philipp Hönicke, Victor Soltwisch

Proceedings Volume 11783, 1178307 (2021) https://doi.org/10.1117/12.2592611

KEYWORDS: Line edge roughness, Line width roughness, Nanostructures, X-ray fluorescence spectroscopy, X-rays, Oxides, Scatterometry, Grazing incidence, Finite element methods

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Proceedings Article | 22 February 2021 Presentation

GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures

Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch

Proceedings Volume 11611, 116110R (2021) https://doi.org/10.1117/12.2586082

KEYWORDS: Nanostructures, Metrology, Machine learning, X-rays, X-ray optics, X-ray fluorescence spectroscopy, Statistical analysis, Semiconducting wafers, Reflectivity, Nondestructive evaluation

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Proceedings Article | 4 November 2020 Presentation + Paper

Study of EUV reticle storage effects through exposure on EBL2 and NXE

Rik Jonckheere, Chien-Ching Wu, Veronique de Rooij-Lohmann, Dorus Elstgeest, Henk Lensen, Philipp Hönicke, Michael Kolbe, Victor Soltwisch, Claudia Zech, Frank Scholze, Remko Aubert, Vineet Nair, Eric Hendrickx

Proceedings Volume 11517, 115170Z (2020) https://doi.org/10.1117/12.2573125

KEYWORDS: Reticles, Extreme ultraviolet lithography, Photomasks, Semiconducting wafers, Ruthenium, Scanners, Contamination, Integrated circuits, Semiconductors, X-rays

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Proceedings Article | 27 June 2019 Paper

Mask absorber development to enable next-generation EUVL

Vicky Philipsen, Kim Vu Luong, Karl Opsomer, Laurent Souriau, Jens Rip, Christophe Detavernier, Andreas Erdmann, Peter Evanschitzky, Christian Laubis, Philipp Hönicke, Victor Soltwisch, Eric Hendrickx

Proceedings Volume 11178, 111780F (2019) https://doi.org/10.1117/12.2537967

KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Metals, Plasma etching, Etching, Optical properties

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Proceedings Article | 21 June 2019 Presentation + Paper

Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction

Anna Andrle, Philipp Hönicke, Philipp Schneider, Yves Kayser, Martin Hammerschmidt, Sven Burger, Frank Scholze, Burkhard Beckhoff, Victor Soltwisch

Proceedings Volume 11057, 110570M (2019) https://doi.org/10.1117/12.2526082

KEYWORDS: Luminescence, Nanostructures, Particle swarm optimization, Silicon, Optimization (mathematics), X-rays, X-ray fluorescence spectroscopy, Finite element methods, Oxides, Sensors

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Showing 5 of 7 publications

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