The state of the art in swept-wavelength laser Fizeau interferometry

Leslie L. Deck; Peter J. de Groot

doi:10.1117/12.2595455

1 August 2021 The state of the art in swept-wavelength laser Fizeau interferometry

Leslie L. Deck, Peter J. de Groot

Proceedings Volume 11817, Applied Optical Metrology IV; 118170N (2021) https://doi.org/10.1117/12.2595455
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

A powerful technique for interference fringe analysis uses tunable light sources. Originally developed to solve the problem of phase shifting in large aperture systems, the technique has evolved to the simultaneous measurement of multiple surfaces and optical thickness of optical assemblies and components. Here we review the principles and current state of the art for swept-wavelength interferometry for optical testing, including recent advances in digital holographic refocusing and environmental robustness using model-based data analysis. Applications for swept-wavelength interferometry span the full optical metrology space; we provide examples of the measurement of glass substrates for rigid data storage drives to planar waveguides for augmented and mixed reality.

Conference Presentation

Citation Download Citation

Leslie L. Deck and Peter J. de Groot "The state of the art in swept-wavelength laser Fizeau interferometry", Proc. SPIE 11817, Applied Optical Metrology IV, 118170N (1 August 2021); https://doi.org/10.1117/12.2595455

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