Measurement of transmitted wavefront error and homogeneity with a low-coherence interferometer

Klaus Freischlad

doi:10.1117/12.2602814

28 October 2021 Measurement of transmitted wavefront error and homogeneity with a low-coherence interferometer

Klaus Freischlad

Author Affiliations +

Proceedings Volume 11889, Optifab 2021; 118890B (2021) https://doi.org/10.1117/12.2602814
Event: SPIE Optifab, 2021, Rochester, New York, United States

Abstract

We describe high-precision measurements of the transmitted wavefront error and refractive index homogeneity of glass plates using a low-coherence interferometer in a downward-looking configuration. With the low-coherence illumination there are no spurious interference fringes even for a plane-parallel sample. Unbiased results are obtained by using a combination of four different measurement steps. The measurement performance and repeatability are shown for the lowcoherence interferometer OptoFlat with a special fixture incorporating sample holder and return mirror. Its ease of handling and supporting software-based user guidance through the measurement steps greatly facilitate wavefront and homogeneity measurements in the optics shop.

Conference Presentation

Citation Download Citation

Klaus Freischlad "Measurement of transmitted wavefront error and homogeneity with a low-coherence interferometer", Proc. SPIE 11889, Optifab 2021, 118890B (28 October 2021); https://doi.org/10.1117/12.2602814

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