A simplified two-phase differential decoding algorithm for high precision grating encoder

Junhao Zhu; Kangning Yu; Gaopeng Xue; Ningning Shi; Qian Zhou; Xiaohao Wang; Xinghui Li

doi:10.1117/12.2602230

9 October 2021 A simplified two-phase differential decoding algorithm for high precision grating encoder

Junhao Zhu, Kangning Yu, Gaopeng Xue, Ningning Shi, Qian Zhou, Xiaohao Wang, Xinghui Li

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 118990F (2021) https://doi.org/10.1117/12.2602230
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

The signal processing of the grating encoder has a great impact on its accuracy and resolution. We proposed a new type of signal processing method for a grating encoder using a two-phase differential algorithm based on the two-phase physical structure. The interference signal could be divided into two phases with 90 degrees phase delay, capable of effectively reducing the number of optical devices and the space occupied by the reading head. Owing to the rapid elimination of the DC component in the measurement signal, the measurement displacement was solved swiftly by the two-phase signal using the algorithm. In the experiment, a 660 nm laser and a 1 µm-period grating were used, and the scale grating was actuated at a speed of 1 µm/s by a linear stage. With a sampling rate of 20 kHz, the system resolution of the grating encoder was enabled to reach 50 pm. Simultaneously, there was a measurement error of ±1 µm at a stroke of 4 mm, and the error within a single cycle was 2 nm. Compared with the four-phase algorithm, our proposed two-phase differential algorithm exhibits a compact physical structure and fast solution without reducing the accuracy and resolution, which will be of great significance to the real-time measurement and miniaturization of grating encoders.

Citation Download Citation

Junhao Zhu, Kangning Yu, Gaopeng Xue, Ningning Shi, Qian Zhou, Xiaohao Wang, and Xinghui Li "A simplified two-phase differential decoding algorithm for high precision grating encoder", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 118990F (9 October 2021); https://doi.org/10.1117/12.2602230

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