Design of implantable microprobe for silicon wet bulk micromachining

Evgeny Yu. Gusev; Artur V. Saryev; Sofya V. Malokhatko; Oleg A. Ageev

doi:10.1117/12.2624530

30 January 2022 Design of implantable microprobe for silicon wet bulk micromachining

Evgeny Yu. Gusev, Artur V. Saryev, Sofya V. Malokhatko, Oleg A. Ageev

Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121570T (2022) https://doi.org/10.1117/12.2624530
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation

Abstract

The paper presents the design features of silicon microprobe with a cross-sectional size less than 100 μm, taking into account the number of electrodes, as well as the conditions of anisotropic wet etching. Analytical calculations were carried out for the probe structure, represented by n-regions of various widths, carrying up to 2n-1 electrodes. The dependences of bottom width of the trapezoidal section of the probe and width of related mask on the thickness and top width of the probe are obtained. The permissible dimension ranges for several cases of one- to four-level microprobes have been established. The correction value of the mask size was estimated, reflecting the effect of etching conditions on the geometry of the probe. Modeling was carried out in an anisotropic wet etching simulator taking into account the conditions of KOH etching (in 20-40% solution at 60-80°C). It allowed to refine the results of the analytical calculations, refine dimensions of the silicon microprobe structure, the geometry of related masks, as well as the extent undercutting effect. The obtained results could be used in development of silicon microprobes formed by anisotropic wet etching.

Citation Download Citation

Evgeny Yu. Gusev, Artur V. Saryev, Sofya V. Malokhatko, and Oleg A. Ageev "Design of implantable microprobe for silicon wet bulk micromachining", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121570T (30 January 2022); https://doi.org/10.1117/12.2624530

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available