Dr. Evgeny Y. Gusev Profile

Dr. Evgeny Y. Gusev

at Southern Federal Univ

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 31 January 2022 Paper

Paper

Design of implantable microprobe for silicon wet bulk micromachining

Evgeny Yu. Gusev, Artur Saryev, Sofya Malokhatko, Oleg Ageev

Proceedings Volume 12157, 121570T (2022) https://doi.org/10.1117/12.2624530

KEYWORDS: Silicon, Wet etching, Electrodes, Photomasks, Bulk micromachining, Anisotropic etching, Semiconducting wafers, Nanotechnology

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Proceedings Article | 31 January 2022 Paper

Paper

High temperature sintering of sol-gel gibbsite film for acoustic membrane

Sergey Avdeev, Daria Ryabova, Evgeny Yu. Gusev, Sofya Malokhatko

Proceedings Volume 12157, 1215714 (2022) https://doi.org/10.1117/12.2624461

KEYWORDS: Aluminum, Sol-gels, Surface roughness, Scanning electron microscopy, Acoustics, Oxides, Sensors, Head, Annealing, Nanotechnology

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Proceedings Article | 31 January 2022 Paper

Paper

Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver

Sofya Malokhatko, Evgeny Yu. Gusev, Oleg Ageev, Timofey Efimov, Evgeny Rassolov, Roman Romashko

Proceedings Volume 12157, 121570R (2022) https://doi.org/10.1117/12.2624430

KEYWORDS: Silicon, Acoustics, Fiber optics, Receivers, Interferometers, Chemical elements, Protactinium, Wet etching, Transducers, Sensors

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Proceedings Article | 15 March 2019 Paper

Paper

Fabrication technology of sol-gel Al2O3 films for organic field-effect transistors

Sergey Avdeev, Evgeny Yu. Gusev

Proceedings Volume 11022, 1102217 (2019) https://doi.org/10.1117/12.2522121

KEYWORDS: Dielectrics, Sol-gels, Annealing, Transistors, Electron beams, Nanotechnology, X-rays, Atomic force microscope

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Proceedings Article | 15 March 2019 Paper

Paper

Plasma deposition of carbon-silicon nanocomposite for microelectromechanical applications

Evgeny Yu. Gusev, Julia Jityaeva, Sergey Lisitsyn, Oleg Ageev

Proceedings Volume 11022, 1102224 (2019) https://doi.org/10.1117/12.2522049

KEYWORDS: High aspect ratio silicon micromachining, Nanocomposites, Silicon, Microelectromechanical systems, Nanorods, Carbon nanotubes, Plasma enhanced chemical vapor deposition, Nanotechnology

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Proceedings Article | 15 March 2019 Paper

Paper

Nanoscale planar ring-shaped matrix field emitters based on multilayer graphene/SiC

I. Jityaev, A. Svetlichnyi, O. Ageev, E. Yu. Gusev

Proceedings Volume 11022, 1102209 (2019) https://doi.org/10.1117/12.2522434

KEYWORDS: Nanoelectronics, Graphene, Silicon carbide, Multilayers, Ion beams, Nanotechnology, Nanostructures, Etching, Electronics

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Showing 5 of 6 publications

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