Plasma enhanced CO2 recombination in EUV drive lasers

Andrew C. Herschberg; Nathan Bartlett; Jameson Crouse; David N. Ruzic

doi:10.1117/12.2664342

28 April 2023 Plasma enhanced CO₂ recombination in EUV drive lasers

Andrew C. Herschberg, Nathan Bartlett, Jameson Crouse, David N. Ruzic

Proceedings Volume 12494, Optical and EUV Nanolithography XXXVI; 124941D (2023) https://doi.org/10.1117/12.2664342
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

During plasma excitation of CO₂ molecules in drive lasers, up to 60% of the CO₂ decomposes into CO. Typically, Au is used as a catalyst to preferentially recombine CO and O radicals into CO₂. By adding a secondary, microwave driven plasma to the system at the Au catalyst, O atoms can be stripped away from contaminants created in the laser such as O_x and NO_x compounds. It is hypothesized that this will decrease the CO:CO₂ ratio, which increases overall laser efficiency. This work serves as a status update on the measurement of CO:CO₂ ratios for 4 tests: 1) control, 2) with Au catalyst installed, 3) with secondary plasma active, and 4) with Au catalyst installed and secondary plasma active.

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Andrew C. Herschberg, Nathan Bartlett, Jameson Crouse, and David N. Ruzic "Plasma enhanced CO₂ recombination in EUV drive lasers", Proc. SPIE 12494, Optical and EUV Nanolithography XXXVI, 124941D (28 April 2023); https://doi.org/10.1117/12.2664342

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