Verification methods for curvilinear and real-curve geometries

Kokoro Kato

doi:10.1117/12.2661609

30 April 2023 Verification methods for curvilinear and real-curve geometries

Kokoro Kato

Proceedings Volume 12495, DTCO and Computational Patterning II; 124950J (2023) https://doi.org/10.1117/12.2661609
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Curvilinear layout data has been used for better mask quality for ILT OPC results, but it has issues such as complexity, huge data volume and absence of established verification methods. In this presentation, fundamental and practical verification methods will be discussed for complicated curvilinear geometries. On top of that, real curve data (parametric curves) has been discussed to reduce the mask data volume. The MULTIGON record has been defined as the real curve expression. We will explain the characteristics of the new record and show the outlook about how the mask industry should deal with its complexity.

Conference Presentation

Citation Download Citation

Kokoro Kato "Verification methods for curvilinear and real-curve geometries", Proc. SPIE 12495, DTCO and Computational Patterning II, 124950J (30 April 2023); https://doi.org/10.1117/12.2661609

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