Thermodynamic effects of pulsed laser multilayer thin film etching

Xiaoli Liu; Licheng Zhou; Wending Liu; Yifan Zhou; Yuqing Xiong; Jizhou Wang

doi:10.1117/12.2683889

31 May 2023 Thermodynamic effects of pulsed laser multilayer thin film etching

Xiaoli Liu, Licheng Zhou, Wending Liu, Yifan Zhou, Yuqing Xiong, Jizhou Wang

Proceedings Volume 12711, Third Optics Frontier Conference (OFS 2023); 127110B (2023) https://doi.org/10.1117/12.2683889
Event: Third Optics Frontier Conference (OFS 2023), 2023, Fuyang, China

Abstract

The impact of the interface effect on the etching accuracy of a non-single-layer structure was utilized as a starting point in this work to analyze the correlation between the integrated structure's film surface/interface temperature field, stress field distribution, and interface mutation. Based on single-factor etching experiments, the relationship between the temperature field, stress field, and laser characteristic parameters was evaluated via a combination of theoretical analysis and numerical simulation. For polyimide-based metal aluminum film, a connection between scanning speed and etching characteristic parameters was discovered. The results illustrate that when Al/PI (aluminum film thickness of 2μm) was irradiated by a laser, the interface temperature reached a certain value, which caused distortion of the film and substrate. Changes in the distribution of the temperature and stress fields of the film affect the heat transfer in the system and thus affect the thermodynamic trajectory, thermal feedback, etching rate, and shape of the target film surface. Ultimately, the etching and removal of the Al/PI integration of the non-single-layer structure are attributed to the interplay of thermal and stress field effects.

Citation Download Citation

Xiaoli Liu, Licheng Zhou, Wending Liu, Yifan Zhou, Yuqing Xiong, and Jizhou Wang "Thermodynamic effects of pulsed laser multilayer thin film etching", Proc. SPIE 12711, Third Optics Frontier Conference (OFS 2023), 127110B (31 May 2023); https://doi.org/10.1117/12.2683889

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available