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17 October 2023 Optical and manufacturing design aware flow for metalenses
M. Chalony, B. Küchler, R. Zimmermann, C. Xu, L. Melvin, E. Viasnoff
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Proceedings Volume 12741, Advanced Materials, Biomaterials, and Manufacturing Technologies for Security and Defence; 1274105 (2023) https://doi.org/10.1117/12.3000524
Event: SPIE Security + Defence, 2023, Amsterdam, Netherlands
Abstract
Metalenses pave the way for drastic miniaturization of imaging systems like electric vehicle cameras, phones, and various other micro-camera applications1 . As an example, researchers in the U.S. used semiconductor manufacturing techniques to produce a large aperture, flat metalens. It was used as the objective lens in a simple telescope. The telescope achieved resolving power superior to refractive and reflective optics and produced clear images of the surface of the Moon2 . Though metalenses are a promising advance in scaling down the size of optical systems, there are challenges, both in their design and preparing them for high volume manufacturing. In this paper, we demonstrate the advantage of a manufacturing aware design flow that combines advanced technology from optical design and manufacturing processes design software that brings a manufactured metalens closer to the ideal metalens performance. The flow aids the implementation of design rules from and to optical and manufacturing design, allows the designer to shorten the design cycle, and ultimately stives for the target of a first design correct metalens.
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M. Chalony, B. Küchler, R. Zimmermann, C. Xu, L. Melvin, and E. Viasnoff "Optical and manufacturing design aware flow for metalenses", Proc. SPIE 12741, Advanced Materials, Biomaterials, and Manufacturing Technologies for Security and Defence, 1274105 (17 October 2023); https://doi.org/10.1117/12.3000524
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KEYWORDS
Manufacturing
Design and modelling
Etching
Metalenses
Optics manufacturing
Lithography
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