Optical and other properties of MPACVD diamond

Paul Southworth; Christopher J. H. Wort; Alan H. Lettington; C. J.T. Smith; A. V. Hetherington

doi:10.1117/12.20514

1 August 1990 Optical and other properties of MPACVD diamond

Paul Southworth, Christopher J. H. Wort, Alan H. Lettington, C. J.T. Smith, A. V. Hetherington

Proceedings Volume 1275, Hard Materials in Optics; (1990) https://doi.org/10.1117/12.20514
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

The exceptional properties of diamond have stimulated a considerable research effort into the low pressure synthesis of diamond thin films for a diverse range of applications including:-. tribological coatings, semiconductor heat sinks and (as in this work) protective optical coatings. Numerous deposition techniques have been reported in the literature including Microwave Plasma Assisted Chemical Vapour Deposition (MPACVD). This paper briefly describes the MPAC\'D deposition system used at Plessey Research Caswell Limited and outlines the effects of important deposition parameters on the growth morphology of diamond crystallites and thin films. Techniques including SEM, ThM and X-ray diffraction have been used to study the growth mechanisms of MPACVD diamond. JR and Raman spectroscopy have been used to characterise the deposited films and an JR reflection technique is described for studying the infrared properties of the layers. The effect of deposition parameters on the properties of diamond thin films is discussed with regard to the use of these films for protecting JR windows and domes.

Citation Download Citation

Paul Southworth, Christopher J. H. Wort, Alan H. Lettington, C. J.T. Smith, and A. V. Hetherington "Optical and other properties of MPACVD diamond", Proc. SPIE 1275, Hard Materials in Optics, (1 August 1990); https://doi.org/10.1117/12.20514

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