Use of yttria-stabilised zirconia substrates for zinc oxide mediated epitaxial lift-off of superior yttria-stabilised zirconia thin films

D. J. Rogers; T. Maroutian; V. E. Sandana; P. Lecoeur; F. H. Teherani; P. Bove; M. Razeghi

doi:10.1117/12.3023431

15 March 2024 Use of yttria-stabilised zirconia substrates for zinc oxide mediated epitaxial lift-off of superior yttria-stabilised zirconia thin films

D. J. Rogers, T. Maroutian, V. E. Sandana, P. Lecoeur, F. H. Teherani, P. Bove, M. Razeghi

Author Affiliations +

Proceedings Volume 12887, Oxide-based Materials and Devices XV; 128870P (2024) https://doi.org/10.1117/12.3023431
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

ZnO layers were grown on (100) and (111) oriented YSZ substrates by pulsed laser deposition (PLD). X-ray diffraction studies revealed growth of wurtzite ZnO with strong preferential (0002) orientation. The ZnO layer on YSZ (111) showed distinct Pendellosung fringes and a more pronounced c-axis orientation (rocking curve of 0.08°). Atomic force microscopy revealed RMS roughnesses of 0.7 and 2.2nm for the ZnO on the YSZ (111) and YSZ (100), respectively. YSZ was then grown on the ZnO buffered YSZ (111) substrate by PLD. XRD revealed that the YSZ overlayer grew with a strong preferential (111) orientation. The YSZ/ZnO/YSZ (111) top surface was temporary bonded to an Apiezon wax carrier and the sample was immersed in 0.1M HCl so as to preferentially etch/dissolve away the ZnO underlayer and release the YSZ from the substrate. XRD revealed only the characteristic (111) peak of YSZ after lift-off and thus confirmed both the dissolution of the ZnO and the preservation of the crystallographic integrity of the YSZ on the wax carrier. Optical and Atomic Force Microscopy revealed some buckling, roughening and cracking of the lifted YSZ, however. XRD suggested that this may have been due to compressive epitaxial strain release.

Citation Download Citation

D. J. Rogers, T. Maroutian, V. E. Sandana, P. Lecoeur, F. H. Teherani, P. Bove, and M. Razeghi "Use of yttria-stabilised zirconia substrates for zinc oxide mediated epitaxial lift-off of superior yttria-stabilised zirconia thin films", Proc. SPIE 12887, Oxide-based Materials and Devices XV, 128870P (15 March 2024); https://doi.org/10.1117/12.3023431

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available