Characterization of new silicon-based micro-electro-mechanical systems for photoacoustic trace-gas detection

Jacopo Pelini; Stefano Dello Russo; Arianna Elefante; Maria Concetta Canino; Alberto Roncaglia; Inaki Lopez Garcia; Pablo Cancio Pastor; Paolo De Natale; Simone Borri; Mario Siciliani de Cumis

doi:10.1117/12.3002282

12 March 2024 Characterization of new silicon-based micro-electro-mechanical systems for photoacoustic trace-gas detection

Jacopo Pelini, Stefano Dello Russo, Arianna Elefante, Maria Concetta Canino, Alberto Roncaglia, Inaki Lopez Garcia, Pablo Cancio Pastor, Paolo De Natale, Simone Borri, Mario Siciliani de Cumis

Author Affiliations +

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 1289905 (2024) https://doi.org/10.1117/12.3002282
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Highly sensitive trace-gas sensors are required in a large range of applications, such as biological, environmental, industrial, and fundamental physics. Photoacoustic spectroscopy has the advantages of compactness and robustness and is characterized by a high degree of flexibility in its configuration, in particular in the selection of the laser source and the transducer. Here we report the experimental characterization of new silicon-based Micro electro-mechanical systems (MEMS) structures to be applied as acoustic-to-voltage transducers in a photo-acoustic-based sensor. In our setup, a 4.5 μm continuous wave quantum cascade laser is used to address strong N₂O roto-vibrational transition, and the detection of MEMS oscillations is performed via a balanced interferometric readout.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jacopo Pelini, Stefano Dello Russo, Arianna Elefante, Maria Concetta Canino, Alberto Roncaglia, Inaki Lopez Garcia, Pablo Cancio Pastor, Paolo De Natale, Simone Borri, and Mario Siciliani de Cumis "Characterization of new silicon-based micro-electro-mechanical systems for photoacoustic trace-gas detection", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 1289905 (12 March 2024); https://doi.org/10.1117/12.3002282

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available