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26 April 2024 Front Matter: Volume 12954
Proceedings Volume 12954, DTCO and Computational Patterning III; 1295401 (2024) https://doi.org/10.1117/12.3031866
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 12954, including the Title Page, Copyright information, Table of Contents, and Conference Committee information.
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 12954", Proc. SPIE 12954, DTCO and Computational Patterning III, 1295401 (26 April 2024); https://doi.org/10.1117/12.3031866
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KEYWORDS
Data modeling
Machine learning
Optical proximity correction
Image processing
Instrument modeling
Lithography
Optical lithography
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