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18 December 2023 Research on composite auto-focus method for on-machine interferometry measurement
Xiaojin Huang, Jianguo He, Qian Liu
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Proceedings Volume 12964, AOPC 2023: Optical Design and Manufacturing ; 129640A (2023) https://doi.org/10.1117/12.3005998
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China
Abstract
White-light scanning interferometry (WSI) is an important tool in the surface topography measurement. The range of white light interference fringes is very narrow, which makes the traditional method of finding fringes extremely timeconsuming and inefficient, affecting the efficiency and automation of the measurement. Aiming at these problems, a composite auto-focus method for on-machine WSI is proposed in this paper. Utilizing the feature of constant relative axial position of cutting tool and measuring system, the position near the interference fringes is quickly located. Then the mountain climbing strategy is adopted to roughly locate the focusing position with the wide spectral light source. Finally, the narrow spectral light source is used to accurately locate the position of zero optical-path difference by finding the coherent envelope peak. The experiments shows that the proposed auto-focus method is effective to find clear fringes in the on-machine interferometry measurement and can achieve a nanoscale accuracy within microns range.
(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Xiaojin Huang, Jianguo He, and Qian Liu "Research on composite auto-focus method for on-machine interferometry measurement", Proc. SPIE 12964, AOPC 2023: Optical Design and Manufacturing , 129640A (18 December 2023); https://doi.org/10.1117/12.3005998
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KEYWORDS
Interferometry
Interferograms
Modulation
Image sharpness
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