High-rate chemical vapor deposition of diamond films by dc arc discharge in hydrogen-methane mixture gas

Xiang-Liu Jiang; Fang-Qing Zhang; Jiang-Qi Li; Bin Yang; Guang-Hua Chen

doi:10.1117/12.22474

1 December 1990 High-rate chemical vapor deposition of diamond films by dc arc discharge in hydrogen-methane mixture gas

Xiang-Liu Jiang, Fang-Qing Zhang, Jiang-Qi Li, Bin Yang, Guang-Hua Chen

Author Affiliations +

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22474
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Polycrystalline diamond films with high growth-rate have been synthesized by dc arc discharge plasma CVD in a mixture gas of CH4 (1) and 112 (99). The diamond films are deposited on water-cooled silicon and molybdenum substrates at gaseous pressure of about 200 Torr. The typical arc discharge is performed at 200V and 4A while the hydrogen flow rate is about 3000 3500 sccm. The crystallinity of diamond films prepared are characterized by Xray differaction (XRD) Raman scattering spectroscopy and scanning electron microscopy (SEM). It is verified by XRD and Raman measurements that the synthesized diamond films are identified as natural cubic diamond structure and contain substantially no graphite or amorphous carbon. SEM photographs show that the crystal grain size reachs 60 80 im with good crystal habit and the average growth rate of diamond films deposited during 4 hours is about 40 - 60 pm/h. As shown by SEM photographs the diamond grain size obviously depends on the local nucleation density. 1.

Citation Download Citation

Xiang-Liu Jiang, Fang-Qing Zhang, Jiang-Qi Li, Bin Yang, and Guang-Hua Chen "High-rate chemical vapor deposition of diamond films by dc arc discharge in hydrogen-methane mixture gas", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22474

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available