Growth and properties of GaxIn1-xAs (x<O.47) on InP by MOCVD

MingZe Du; Jinshan Yuan; Yixin Jin; Tianming Zhou; Jiang Hong; ChunRong Hong; BaoLin Zhang

doi:10.1117/12.24432

1 March 1991 Growth and properties of GaxIn1-xAs (x

MingZe Du, Jinshan Yuan, Yixin Jin, Tianming Zhou, Jiang Hong, ChunRong Hong, BaoLin Zhang

Proceedings Volume 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization; (1991) https://doi.org/10.1117/12.24432
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

Ga As (x 47) epitayers tatticemismatched to laP and steptike composition tayers of InAs (O 61) were prepared by atmospheric pressure metatorganic chemical vapor deposition (MOCVD) with a horizontal reactor using trimethytindiu. m (TMIn) trimethylgalliu. m ( TMGa) arsine (AsH and phosphine (PH as the source materials. The alloy compositions were measured by the Electronic Probe (EP) and the XRay Diffraction (XRD) . The crystalline quality of the epilayer was detected by the Xray double diffraction and the composition depth profile of Ga. InAs/InAsP1 InP was measured by secondary ion mass spectrometry (SIMS)respectively. It indicated that the introduction of steplike composition layers was an effective method for decreasing the latticemismatch between layers and improving the crystalline quality.

Citation Download Citation

MingZe Du, Jinshan Yuan, Yixin Jin, Tianming Zhou, Jiang Hong, ChunRong Hong, and BaoLin Zhang "Growth and properties of GaxIn1-xAs (xhttps://doi.org/10.1117/12.24432

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available