Investigation into the characteristics of a-C:H films irradiated by electron beam

Shulin Gu; Yuliang L. He; Zhi Chao Wang

doi:10.1117/12.47212

1 November 1991 Investigation into the characteristics of a-C:H films irradiated by electron beam

Shulin Gu, Yuliang L. He, Zhi Chao Wang

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47212
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

The characteristics of a-C:H films irradiated by different doses of electron beam have been studied by x-ray diffraction. IR absorption, Raman scattering, and resonant nuclear reaction. Such irradiation can lead the structure of a-C:H films to change in a different degree. The proportions of diamond crystalline and graphite structures in a-C:H films have a proper change simultaneously. The experimental results show a relationship to the action of hydrogen and a proper explanation is given.

Citation Download Citation

Shulin Gu, Yuliang L. He, and Zhi Chao Wang "Investigation into the characteristics of a-C:H films irradiated by electron beam", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47212

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